Consider what you want to be looking at, and when you want to be looking at it. My team has a pre-match checklist, a post-match checklist, and a series of subsystem checklists.
The pre-match checklist focuses on what we need to do to be ready to go on the field - getting the robot in the starting configuration, charging pneumatics, doing a final check on connectors and for pneumatic leaks, making sure we have everything with us when we leave the pit, etc.
The post-match checklist looks for damage, loose bolts, and other items that may have been impacted during the match.
The subsystem checklists use images from our CAD to call out the specific areas we want to look at - where there are bolts we want to check, belt or chain we want to ensure is properly tensioned, sensors we want to make sure are still working correctly, etc.
Somewhat of a tangent, but we also have a post-match driveteam report. Pretty simple, but it provides the drive team with a chance to give feedback to our scouters on each of the teams on the field in that match.